Recently, the performance of these devices improved significantly with progress in material growth methods, device and electrode designs, and fabrication technologies. 5,6 Reliable AlGaInP-based LEDs with high brightness are attractive devices because AlGaInP has a direct energy bandgap in the visible spectrum in the yellow to red region. 1–4 Because of their micro-scale size and energy-saving characteristics, micro-LED arrays can offer better current distribution, higher brightness, more uniform light output and faster response times than regular illumination or display devices. Micro-light-emitting diode (micro-LED) arrays that can be used as optical switches and microdisplays in communication networks have attracted considerable attention in recent years.
The micro-opto-electro-mechanical systems (MOEMS) technology-based fabrication process, experimental images of the device and device test results are presented here. The layered temperature distribution in a single unit was simulated under a drive voltage of 2.2 V, and the maximum device temperature was 341 K. The device current used was in the 0.42–1.06 mA range to guarantee internal quantum efficiency of more than 85%, with a corresponding voltage range of 2–2.3 V. The 10-µm-wide square-circle anode was designed to increase the light emitting area while simultaneously being simple to fabricate.
The grooves were filled with a mixed Si granule-polyurethane composite medium, because this type of insulating material can reflect part of the emitted light from the sidewall to the window layer in each light-emitting unit, and could thus improve lighting output efficiency.
Anode and cathode led length full#
The optimum width of the isolation groove between adjacent light-emitting units was determined based on a compromise between full isolation of each LED and maximization of the light emitting area, and was found to be 20 µm.
An array of 320 × 240 micro-light-emitting diodes (micro-LEDs) based on an AlGaInP epitaxial wafer and with a unit size of 100 µm×100 µm was designed and fabricated.
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